Patents/Inventors

Takayuki Yabu

OyamaJP3 patents

4 Patents

US123325752025
Target Supply System, Extreme Ultraviolet Light Generation Apparatus, and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US119249542024
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US117787212023
Extreme Ultraviolet Light Generation System and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US115535832023
Extreme Ultraviolet Light Generation System and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites