Patents/Inventors

Takayuki Osanai

OyamaJP3 patents

2 Patents

US125126402025
Laser System, Pulse Laser Light Generating Method, and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US117893742023
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites