8 Patents
- US121230912024Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites - US121073972024Electric Discharge Device and Electrode Device
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., Ltd.
0 cites - US120625462024Substrate Processing Device, Manufacturing Method for Semiconductor Device, and Reaction Tube
KOKUSAI ELECTRIC CORPORATION
0 cites - US119357622024Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites - US118460252023Substrate Processing Apparatus Capable of Adjusting Inner Pressure of Process Chamber Thereof and Method Therefor
KOKUSAI ELECTRIC CORPORATION
0 cites - US117869222023Voltage Application Device and Discharge Device
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., Ltd.
0 cites - US116949072023Substrate Processing Apparatus, Recording Medium, and Fluid Circulation Mechanism
KOKUSAI ELECTRIC CORPORATION
0 cites - US115524572023Discharge Device and Method for Manufacturing Same
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., Ltd.
0 cites