Patents/Inventors

Takayuki Katsunuma

MiyagiJP13 patents

13 Patents

US126092872026
Method for Etching Film and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US125884472026
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123548372025
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123343312025
Substrate Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123343432025
Substrate Processing Method and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US121547922024
Plasma Etching Method
TOKYO ELECTRON LIMITED
0 cites
US121129542024
Etching Method, Substrate Processing Apparatus, and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US119695752024
Medical Infusion Pump, Method of Controlling Medical Infusion Pump, and Medical Infusion Pump System
TERUMO KABUSHIKI KAISHA
0 cites
US119553162024
Substrate Processing Method, Method for Manufacturing Semiconducor Device, and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119553372024
Substrate Processing Method and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US116642362023
Method of Etching Film and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US116370032023
Method for Etching Film and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US116178302023
Medical Pump, Method of Controlling Medical Pump, and Medical Pump System
TERUMO KABUSHIKI KAISHA
0 cites