Patents/Inventors

Takayuki Ishii

MiyagiJP3 patents

4 Patents

US124943492025
Member, Manufacturing Method of Member and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123225992025
Substrate Processing Method, Modification Device and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US122886762025
Stage and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US119190322024
Film Forming Apparatus and Method for Manufacturing Part Having Film Containing Silicon
TOKYO ELECTRON LIMITED
0 cites