Takaya Maehashi

3 Patents

• US117477242023

  Organically Modified Metal Oxide Nanoparticles, Organically Modified Metal Oxide Nanoparticles-containing Solution, Organically Modified Metal Oxide Nanoparticles-containing Resist Composition, and Resist Pattern Forming Method

  NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

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• US117094252023

  Resist Composition and Method of Forming Resist Pattern

  Tokyo Ohka Kogyo Co., Ltd.

  0 cites
• US115604442023

  Method of Producing Block Copolymer Capable of Creating Specific Structure Pattern

  TOKYO INSTITUTE OF TECHNOLOGY

  0 cites