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Inventors
Takatoshi Orui
Hillsboro, OR
US
10 patents
9 Patents
US12512325
2025
Etching Method and Etching Apparatus
TOKYO ELECTRON LIMITED
0 cites
US12400863
2025
Method for Etching for Semiconductor Fabrication
TOKYO ELECTRON LIMITED
0 cites
US12368027
2025
Substrate Processing Method and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US12347651
2025
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US12198938
2025
Etching Method
TOKYO ELECTRON LIMITED
0 cites
US12142484
2024
Etching Method
TOKYO ELECTRON LIMITED
0 cites
US11615964
2023
Etching Method
TOKYO ELECTRON LIMITED
0 cites
US11600501
2023
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US11551937
2023
Etching Method
TOKYO ELECTRON LIMITED
0 cites