Takatoshi Inari

3 Patents

• US125663762026

  Resist Composition and Resist Pattern Forming Method

  Tokyo Ohka Kogyo Co., Ltd.

  0 cites
• US117809462023

  Alternating Copolymer, Method of Producing Alternating Copolymer, Method of Producing Polymeric Compound, and Method of Forming Resist Pattern

  TOKYO OHKA KOGYO CO., Ltd.

  0 cites
• US117477242023

  Organically Modified Metal Oxide Nanoparticles, Organically Modified Metal Oxide Nanoparticles-containing Solution, Organically Modified Metal Oxide Nanoparticles-containing Resist Composition, and Resist Pattern Forming Method

  NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

  0 cites