Patents/Inventors

Takashi Taira

MiyagiJP3 patents

3 Patents

US122610282025
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119843012024
Edge Ring, Substrate Support, Substrate Processing Apparatus and Method
TOKYO ELECTRON LIMITED
0 cites
US115628922023
Dielectric Member, Structure, and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites