Takashi Nogami

3 Patents

• US122610662025

  Substrate Processing Apparatus and Furnace Opening Closer

  Kokusai Electric Corporation

  0 cites
• US122550692025

  Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium

  Kokusai Electric Corporation

  0 cites
• US121230912024

  Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device

  KOKUSAI ELECTRIC CORPORATION

  0 cites