Patents/Inventors

Takashi Mitsuya

TokyoJP1 patent

2 Patents

US122371942025
Substrate Transporter and Substrate Processing Apparatus Including Substrate Transporter
EBARA CORPORATION
0 cites
US119118682024
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium That Stores Program to Cause Computer in Substrate Processing Apparatus to Execute Substrate Processing Method
EBARA CORPORATION
0 cites