Patents/Inventors

Takashi Hosaka

TochigiJP1 patent

2 Patents

US124095582025
Conveyance Apparatus, Substrate Processing Apparatus, Conveyance Method, and Article Manufacturing Method
Canon Kabushiki Kaisha
0 cites
US122145292025
Conveyance Apparatus, Planarization Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites