Patents/Inventors

Takashi Dokan

MiyagiJP6 patents

7 Patents

US125371722026
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US121989622025
Maintenance Device, Vacuum Processing System, and Maintenance Method
TOKYO ELECTRON LIMITED
0 cites
US121658422024
Control Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118715032024
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117640822023
Control Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117421812023
Control Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117421822023
Control Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites