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Inventors
Takashi Chiba
Iwate
JP
10 patents
5 Patents
US12618145
2026
Film-forming Method and Film-forming Apparatus
Tokyo Electron Limited
0 cites
US12562345
2026
Monitoring Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US12447962
2025
Vehicle Control Apparatus Controlling an Own Vehicle Based on Detection of a Cut-in Vehicle
TOYOTA JIDOSHA KABUSHIKI KAISHA
0 cites
US12362142
2025
Plasma Processing Method and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US11718911
2023
Deposition Method
Tokyo Electron Limited
0 cites