Patents/Inventors

Takanobu Hotta

YamanashiJP7 patents

7 Patents

US125842202026
Showerhead and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US122278432025
Film Forming Method and Tungsten Film
Tokyo Electron Limited
0 cites
US122216932025
Stress Reducing Method
Tokyo Electron Limited
0 cites
US121881252025
Showerhead and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US119843192024
Substrate Processing Method and Film Forming System
TOKYO ELECTRON LIMITED
0 cites
US117537192023
Flow Rate Control Method, Flow Rate Control Device, and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites
US116294042023
Method of Forming Tungsten Film and Controller
TOKYO ELECTRON LIMITED
0 cites