Takanao Touya

4 Patents

• US125923602026

  Multi Charged Particle Beam Writing Method and Multi Charged Particle Beam Writing Apparatus

  Nuflare Technology, Inc.

  0 cites
• US120091752024

  Charged Particle Beam Writing Apparatus

  Nuflare Technology, Inc.

  0 cites
• US119086592024

  Multi Charged Particle Beam Writing Apparatus

  Nuflare Technology, Inc.

  0 cites
• US118043602023

  Multi Charged Particle Beam Adjustment Method, Multi Charged Particle Beam Irradiation Method, and Multi Charged Particle Beam Irradiation Apparatus

  Nuflare Technology, Inc.

  0 cites