Patents/Inventors

Takamitsu Takayama

MiyagiJP1 patent

2 Patents

US120905292024
Method of Cleaning Stage in Plasma Processing Apparatus, and the Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118655912024
Method of Cleaning Stage in Plasma Processing Apparatus, and the Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites