Patents/Inventors

Takamichi Kikuchi

NirasakiJP5 patents

4 Patents

US125459942026
Film Forming Method and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124566052025
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites
US124287272025
Cyclic Film Deposition Using Reductant Gas
Tokyo Electron Limited
0 cites
US120273442024
Film Forming Apparatus
Tokyo Electron Limited
0 cites