Patents/Inventors

Takaki Kobune

MiyagiJP3 patents

4 Patents

US123879142025
Upper Electrode Assembly
TOKYO ELECTRON LIMITED
0 cites
US123157022025
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US121658502024
Electrode for Plasma Processing Apparatus and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US121485982024
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites