Patents/Inventors

Takahito Kumazaki

OyamaJP2 patents

3 Patents

US124383332025
Line Narrowing Gas Laser Device, Wavelength Control Method, and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US123009622025
Laser Device and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US121115772024
Line Narrowing Device, Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites