Patents/Inventors

Takahiro Yatsu

TokyoJP2 patents

3 Patents

US119205762024
Cryopump and Method of Monitoring Cryopump
SUMITOMO HEAVY INDUSTRIES, Ltd.
0 cites
US118853212024
Cryopump, Cryopump System, and Method for Starting Operation of Cryopump
SUMITOMO HEAVY INDUSTRIES, Ltd.
0 cites
US117327032023
Cryopump and Regeneration Method of Cryopump
SUMITOMO HEAVY INDUSTRIES, Ltd.
0 cites