Patents/Inventors

Takahiro Shindo

NirasakiJP3 patents

4 Patents

US124760842025
Plasma Processing Apparatus, High-frequency Power Supply Circuit, and Impedance Matching Method
Kyushu University, National University Corporation
0 cites
US124566052025
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites
US123548462025
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US120273442024
Film Forming Apparatus
Tokyo Electron Limited
0 cites