Patents/Inventors

Takahiro Mikami

TokyoJP2 patents

3 Patents

US121548032024
Substrate-floatation-type Laser Processing Apparatus and Method for Measuring Floating Height
JSW AKTINA SYSTEM CO., Ltd
0 cites
US121387102024
Laser Processing Apparatus and Method of Manufacturing Semiconductor Device
JSW AKTINA SYSTEM CO., Ltd
0 cites
US117495452023
Substrate-floatation-type Laser Processing Apparatus and Method for Measuring Floating Height
JSW AKTINA SYSTEM CO., Ltd
0 cites