Takahiro Koga

3 Patents

• US121095802024

  Processing Liquid Nozzle and Cleaning Apparatus

  TOKYO ELECTRON LIMITED

  0 cites
• US120516052024

  Substrate Processing Apparatus

  TOKYO ELECTRON LIMITED

  0 cites
• US118137362023

  Workpiece Supply-and-discharge Device

  HONDA MOTOR CO., Ltd.

  0 cites