Patents/Inventors

Takahiro Kitazawa

KyotoJP7 patents

6 Patents

US125715932026
Light Irradiation Type Heat Treatment Method and Heat Treatment Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US125506652026
Temperature Measurement Method and Heat Treatment Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US124127612025
Method of Controlling the Patterned Wafer Process Temperature Using the Contact Type Thermometer in the Front Side of a Dummy Substrate to Accurately Measure Emissivity in Order to Perform Temperature Measurement Using Radiation Thermometer
SCREEN Holdings Co., Ltd.
0 cites
US121548002024
Heat Treatment Apparatus and Heat Treatment Method
SCREEN Holdings Co., Ltd.
0 cites
US120573522024
Heat Treatment Method and Heat Treatment Apparatus of Light Irradiation Type
SCREEN HOLDINGS CO., Ltd.
0 cites
US118760062024
Heat Treatment Method and Heat Treatment Apparatus of Light Irradiation Type
SCREEN Holdings Co., Ltd.
0 cites