Takahiro Kawawa

3 Patents

• US120209682024

  Method for Adjusting Contact Position of Lift Pins, Method for Detecting Contact Position of Lift Pins, and Substrate Placement Mechanism

  Tokyo Electron Limited

  0 cites
• US120026622024

  Electrostatic Attraction Device and Neutralization Method

  Tokyo Electron Limited

  0 cites
• US118624392024

  Substrate Processing Apparatus and Charge Neutralization Method for Mounting Table

  Tokyo Electron Limited

  0 cites