9 Patents
- US125460022026Reaction Tube, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites - US125403882026Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites - US122116892025Method of Manufacturing Semiconductor Device Capable of Controlling Film Thickness Distribution
KOKUSAI ELECTRIC CORPORATION
0 cites - US122031672025Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites - US120538052024Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites - 0 cites
- US118982472024Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium
Kokusai Electric Corporation
0 cites - US118592802024Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites - US116859922023Substrate Processing Apparatus, Quartz Reaction Tube and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites