Patents/Inventors

Takafumi Miyaharu

TochigiJP7 patents

7 Patents

US124297952025
Detection Apparatus, Lithography Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US123266682025
Detection Apparatus, Lithography Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US121533432024
Imprint Method, Imprint Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US120726382024
Exposure Apparatus, Exposure Method, and Method of Manufacturing Article
CANON KABUSHIKI KAISHA
0 cites
US120238502024
Position Detection Apparatus, Imprint Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US118358692023
Exposure Apparatus, Exposure Method, and Method of Manufacturing Article
CANON KABUSHIKI KAISHA
0 cites
US116565472023
Imprint Apparatus, Imprinting Method, and Product Manufacturing Method
Canon Kabushiki Kaisha
0 cites