Patents/Inventors

Takafumi Kinuta

KakegawaJP4 patents

3 Patents

US125709352026
Substrate Cleaning Solution, and Using the Same, Method for Manufacturing Cleaned Substrate and Method for Manufacturing Device
Merck Patent GmbH
0 cites
US120681502024
Substrate Cleaning Solution, and Using the Same, Method for Manufacturing Cleaned Substrate and Method for Manufacturing Device
Merck Patent GmbH
0 cites
US119011732024
Substrate Processing Method
SCREEN Holdings Co., Ltd.
0 cites