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Inventors
Takafumi Dasai
Ibaraki
JP
1 patent
3 Patents
US12404580
2025
Tungsten Silicide Target Member and Method for Manufacturing Same, and Method for Manufacturing Tungsten Silicide Film
JX Advanced Metals Corporation
0 cites
US11939647
2024
Tungsten Target
JX Metals Corporation
0 cites
US11939661
2024
Tungsten Sputtering Target and Method for Manufacturing the Same
JX Metals Corporation
0 cites