Patents/Inventors

Takaaki Kikuchi

MiyagiJP4 patents

6 Patents

US122610282025
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US120148972024
Ventilated Semiconductor Processing Apparatus
Hitachi High-tech Corporation
0 cites
US119843012024
Edge Ring, Substrate Support, Substrate Processing Apparatus and Method
TOKYO ELECTRON LIMITED
0 cites
USD09898302023
Semiconductor Substrate Transfer Apparatus
Hitachi High-tech Corporation
0 cites
USD09898312023
Apparatus for Evaluating Semiconductor Substrate
Hitachi High-tech Corporation
0 cites
USD09891442023
Apparatus for Evaluating Semiconductor Substrate
Hitachi High-tech Corporation
0 cites