32 Patents
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- US125608682026System and Method for Omnidirectional Real Time Detection of Photolithography Characteristics
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US125411522026EUV Lithography System with 3D Sensing and Tunning Modules
TAIWAN SEMCONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - 0 cites
- US124227552025Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
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- US123728862025Acoustic Particle Deflection in Lithography Tool
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - 0 cites
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- US121745452024System and Method for Performing Extreme Ultraviolet Photolithography Processes
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
- US120858602024System and Method for Monitoring and Controlling Extreme Ultraviolet Photolithography Processes
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
- US120789332024System and Method for Omnidirectional Real Time Detection of Photolithography Characteristics
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
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- US119675702024Semiconductor Package Having Improved Thermal Interface Between Semiconductor Die and Heat Spreading Structure
Mediatek Inc.
0 cites - US119069022024Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US118529782023EUV Lithography System with 3D Sensing and Tunning Modules
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US118222592023Acoustic Particle Deflection in Lithography Tool
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US117684372023System and Method for Performing Extreme Ultraviolet Photolithography Processes
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US117624392023Method and Apparatus of Dynamic Thermal Management Based on Surface Temperatures of Portable Device
MEDIATEK Inc.
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- US117054132023Semiconductor Package Having Improved Thermal Interface Between Semiconductor Die and Heat Spreading Structure
MEDIATEK Inc.
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- US116328492023Method and Apparatus for Mitigating Contamination
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - 0 cites