10 Patents
- 0 cites
- US123157032025Plasma Processing Apparatus and Methods of Manufacturing Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - 0 cites
- US120681402024Method and System for Monitoring Substrate Processing Apparatus
Samsung Electronics Co., Ltd.
0 cites - 0 cites
- US119643572024Conditioner, Chemical Mechanical Polishing Apparatus Including the Same and Method of Manufacturing a Semiconductor Device Using the Apparatus
Samsung Electronics Co., Ltd.
0 cites - 0 cites
- US119292392024Plasma Processing Apparatus and Semiconductor Device Manufacturing Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US116055512023Chuck Assembly, Semiconductor Device Fabricating Apparatus Including the Same, and Method of Fabricating Semiconductor Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US115906282023Rotary Body Module and Chemical Mechanical Polishing Apparatus Having the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites