Patents/Inventors

Taekjin Kim

Suwon-siKR3 patents

2 Patents

US125623572026
Apparatus for Monitoring a Plasma Process
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US125557572026
Semiconductor Equipment Monitoring Apparatus, and Semiconductor Equipment Including the Semiconductor Equipment Monitoring Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
0 cites