13 Patents
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- US124659582025Ultrasonic Cleaning Unit with Improved Cleaning Performance, and Substrate Cleaning Apparatus Including the Same
DEVICE CO., Ltd
0 cites - US123961032025Device for Etching the Periphery Edge of a Substrate and Method for Controlling Etching Thereof
DEVICE CO., Ltd.
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- US121486342024Device for Etching the Periphery Edge of a Substrate Comprising Substrate Sensing Unit
DEVICEENG CO., Ltd.
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- US120597132024Substrate Treating Apparatus Comprising Ultrasonic Wave Cleaning Unit
DEVICEENG CO., Ltd.
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