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Inventors
Tae Shin Kim
Chungcheongnam-do
KR
10 patents
9 Patents
US12553138
2026
Apparatus and Method of Processing Substrate
SEMES CO., Ltd.
0 cites
US12550661
2026
Apparatus for Treating Substrate
Semes Co., Ltd.
0 cites
US12381097
2025
Substrate Treating Apparatus
SEMES CO., Ltd.
0 cites
US12224200
2025
Substrate Treating Apparatus
SEMES CO., Ltd.
0 cites
US12094733
2024
Substrate Treatment Apparatus
SEMES CO., Ltd.
0 cites
US12055857
2024
Mask Processing Apparatus and Substrate Processing Apparatus
SEMES Co., Ltd.
0 cites
US11923213
2024
Substrate Heating Unit, Substrate Processing Apparatus, and Substrate Processing Method
SEMES CO., Ltd.
0 cites
US11772198
2023
Apparatus Including Laser Heating for Etching Thin Layer
SEMES CO., Ltd.
0 cites
US11715651
2023
Apparatus for and Method of Treating Substrate
SEMES CO., Ltd.
0 cites