Patents/Inventors

Tae Seung Cho

San Jose, CAUS5 patents

5 Patents

US120092282024
Low Temperature Chuck for Plasma Processing Systems
Applied Materials, Inc.
0 cites
US120026592024
Apparatus for Generating Etchants for Remote Plasma Processes
APPLIED MATERIALS, Inc.
0 cites
US119159112024
Two Piece Electrode Assembly with Gap for Plasma Control
Applied Materials, Inc.
0 cites
US119011612024
Methods and Apparatus for Symmetrical Hollow Cathode Electrode and Discharge Mode for Remote Plasma Processes
APPLIED MATERIALS, Inc.
0 cites
US115944282023
Low Temperature Chuck for Plasma Processing Systems
Applied Materials, Inc.
0 cites