Patents/Inventors

Tae Joong Ha

Icheon-siKR1 patent

2 Patents

US124682162025
Phase Shift Mask for EUV Lithography and Manufacturing Method for the Phase Shift Mask
SK Hynix Inc.
0 cites
US120259122024
Phase Shift Mask for EUV Lithography and Manufacturing Method for the Phase Shift Mask
SK Hynix Inc.
0 cites