Tadashi Takasaki

10 Patents

• US124244092025

  Substrate Processing Apparatus, Substrate Processing Method, Method of Manufacturing Semiconductor Device, and Non-transitory Computer-readable Recording Medium

  Kokusai Electric Corporation

  0 cites
• US123920322025

  Substrate Processing Apparatus with Cleaning of Exhaust System

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US123879492025

  Substrate Processing Apparatus

  Kokusai Electric Corporation

  0 cites
• US123277552025

  Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium

  Kokusai Electric Corporation

  0 cites
• US121658942024

  Processing Method, Method of Manufacturing Semiconductor, and Substrate Processing Apparatus

  Kokusai Electric Corporation

  0 cites
• US120930212024

  Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium

  Kokusai Electric Corporation

  0 cites
• US119675132024

  Substrate Processing Apparatus

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US119231732024

  Substrate Processing Apparatus, Substrate Processing Method, Method of Manufacturing Semiconductor Device, and Non-transitory Computer-readable Recording Medium

  Kokusai Electric Corporation

  0 cites
• US117477892023

  Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US117495502023

  Method of Manufacturing Semiconductor Device by Setting Process Chamber Maintenance Enable State

  KOKUSAI ELECTRIC CORPORATION

  0 cites