Patents/Inventors

Tadashi Mitsunari

NirasakiJP5 patents

5 Patents

US125459942026
Film Forming Method and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123621432025
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites
US123126832025
Substrate Processing Method and Substrate Processing Device
Tokyo Electron Limited
0 cites
US117215572023
Etching Method
Tokyo Electron Limited
0 cites
US116580082023
Film Forming Apparatus and Film Forming Method
Tokyo Electron Limited
0 cites