Tadahiro Yasuda

5 Patents

• US123995162025

  Flow Ratio Controller System Operating in Alternative Control Modes

  HORIBA STEC, Co., Ltd.

  0 cites
• US123277502025

  Electrostatic Chuck Device, Pressure Calculation Method and Program

  HORIBA STEC, Co., Ltd.

  0 cites
• US123066442025

  Hybrid Flow Ratio Controller System with Channels for Flow Ratio Control, Flow Rate or Pressure Control, and Overflow Control

  HORIBA STEC, Co., Ltd.

  0 cites
• US118673082024

  Piezoelectric Actuator and Fluid Control Valve

  HORIBA STEC, Co., Ltd.

  0 cites
• US116866032023

  Pressure Type Flowmeter and Fluid Control Device

  HORIBA STEC, Co., Ltd.

  0 cites