Patents/Inventors

Ta-hao Kuo

Hsinchu CountyTW4 patents

5 Patents

US124216002025
2-in-1 (uv-assisted and Plasma Enhanced) ALD and ALE Chamber
SKY TECH Inc.
0 cites
US124036852025
Plate Cooling Device and De-bonding Station with Plate Cooling Device
SKY TECH Inc.
0 cites
US122241592025
Gas Mixing Method to Enhance Plasma
SKY TECH Inc.
0 cites
US118460222023
Thin-film-deposition Machine
SKY TECH Inc.
0 cites
US117394232023
Atomic Layer Deposition Apparatus for Coating on Fine Powders
SKY TECH Inc.
0 cites