Patents/Inventors

Szu-ping Tung

TaipeiTW12 patents

12 Patents

US124513932025
Etch Stop Layer for Semiconductor Devices
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US124008752025
Film Deposition for Patterning Process
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123745882025
Method for Evaluating Non-uniform Stress
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US122058242025
Patterning Material Including Silicon-containing Layer and Method for Semiconductor Device Fabrication
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121598382024
Method of Forming an Interconnect Structure Having an Air Gap and Structure Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120574452024
Method of Manufacturing a Semiconductor Device and a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119919302024
Memory Device and Method for Fabricating the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO, Ltd.
0 cites
US118044102023
Thin-film Non-uniform Stress Evaluation
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US117696932023
Metal-based Etch-stop Layer
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117156402023
Patterning Material Including Silicon-containing Layer and Method for Semiconductor Device Fabrication
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116826242023
Method of Forming an Interconnect Structure Having an Air Gap and Structure Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116519932023
Etch Stop Layer for Semiconductor Devices
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites