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Inventors
Syuta Ochi
Ehime
JP
1 patent
2 Patents
US12243708
2025
Ion Generator and Ion Implanter
SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., Ltd.
0 cites
US11848170
2023
Ion Generator and Ion Implanter
SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO, Ltd.
0 cites