Patents/Inventors

Syuji Nozawa

NirasakiJP11 patents

7 Patents

US126205652026
Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US122975392025
Film Forming System and Film Forming Method
Tokyo Electron Limited
0 cites
US121042512024
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US120515712024
Substrate Processing Method and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US119232422024
Method of Manufacturing Semiconductor Device
Tokyo Electron Limited
0 cites
US118430272023
Method of Manufacturing Semiconductor Device
Tokyo Electron Limited
0 cites
US116948912023
Film Forming Apparatus and Film Forming Method
TOKYO ELECTRON LIMITED
0 cites