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Swaminathan T. Srinivasan
Pleasanton, CA
US
5 patents
6 Patents
US12221694
2025
Conditioning of a Processing Chamber
Applied Materials, Inc.
0 cites
US12091749
2024
Method for Epitaxially Depositing a Material on a Substrate by Flowing a Process Gas Across the Substrate from an Upper Gas Inlet to an Upper Gas Outlet and Flowing a Purge Gas from a Lower Gas Inlet to a Lower Gas Outlet
Applied Materials, Inc.
0 cites
US12074042
2024
High-density Substrate Processing Systems and Methods
Applied Materials, Inc.
0 cites
US12060651
2024
Chamber Architecture for Epitaxial Deposition and Advanced Epitaxial Film Applications
Applied Materials, Inc.
0 cites
US12018372
2024
Gas Injector for Epitaxy and CVD Chamber
Applied Materials, Inc.
0 cites
US11574826
2023
High-density Substrate Processing Systems and Methods
Applied Materials, Inc.
0 cites