Patents/Inventors

Sven Lindfors

EspooFI1 patent

2 Patents

US124547542025
Atomic Layer Deposition Reactor Comprising a Top-loading Reaction Chamber Configured to Carry a Batch of Vertically Oriented Substrates
Picosun Oy
0 cites
US123839232025
Atomic Layer Deposition with Plasma Source
Picosun Oy
0 cites