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Sven Antoin Johan Hol
San Jose, CA
US
2 patents
2 Patents
US11764027
2023
Systems and Methods of Cooling Objective Lens of a Charged-particle Beam System
ASML Netherlands B.V.
0 cites
US11621142
2023
Substrate Positioning Device and Electron Beam Inspection Tool
ASML Netherlands B.V.
0 cites