4 Patents
- 0 cites
- US122288582025Coating Composition for Forming Resist Underlayer Film for EUV Lithography Process
DUPONT SPECIALTY MATERIALS KOREA Ltd
0 cites - US120558542024Coating Composition for Photoresist Underlayer
ROHM AND HAAS ELECTRONIC MATERIALS KOREA Ltd.
0 cites - US115674092023Polymers, Underlayer Coating Compositions Comprising the Same, and Patterning Methods
ROHM AND HAAS ELECTRONIC MATERIALS KOREA Ltd.
0 cites