5 Patents
- 0 cites
- US121966172025Temperature Profile Measurement and Synchronized Control on Substrate and Susceptor in an Epitaxy Chamber
Applied Materials, Inc.
0 cites - 0 cites
- US118609732024Method and System for Foreline Deposition Diagnostics and Control
Applied Materials, Inc.
0 cites - US116353382023Rapid Chamber Vacuum Leak Check Hardware and Maintenance Routine
Applied Materials, Inc.
0 cites